This volume is devoted to the physics, instrumentation andanalytical methods of secondary ion mass spectroscopy (SIMS) in relationto solid surfaces.
It describes modern models of secondary ion formation and the factorsinfluencing sensitivity of measurements and the range of applications.All the main parts of SIMS instruments are discussed in detail.Emphasising practical applications the book also considers the methodsand analytical procedures for constitutional analysis of solids ---including metals, semiconductors, organic and biological samples.Methods of depth profiling, spatially multidimensional analysis andstudy of processes at the surface, such as adsorption, catalysis andoxidation, are given along with the application of SIMS in combinationwith other methods of surface analysis.
This book will be of interest to fundamental and industrial researchers,and SIMS instrument users, in the fields of microelectronics,metallurgy, analytical chemistry and surface physics.
1987; viii+138 pages ISBN 90-6764-078-6 Price (all prices are subject to change without notice): EUR 95/US$ 136
